The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Jul. 14, 2007
Kyoung Woo Lee, Suwon-si, KR;
Ja Hum Ku, Gyeonggi-do, KR;
Jun Jung Kim, Gyeonggi-do, KR;
Chong Kwang Chang, Gyeonggi-do, KR;
Min-chul Sun, Gyeonggi-do, KR;
Jong Ho Yang, Fishkill, NY (US);
Thomas W. Dyer, Pleasant Valley, NY (US);
Kyoung Woo Lee, Suwon-si, KR;
Ja Hum Ku, Gyeonggi-do, KR;
Jun Jung Kim, Gyeonggi-do, KR;
Chong Kwang Chang, Gyeonggi-do, KR;
Min-Chul Sun, Gyeonggi-do, KR;
Jong Ho Yang, Fishkill, NY (US);
Thomas W. Dyer, Pleasant Valley, NY (US);
Samsung Electronics Co., Ltd., Suwon-Si, KR;
International Business Machines Corporation, Armonk, NY (US);
Abstract
Semiconductor fabrication processes are provided for removing sidewall spacers from gate structures while mitigating or otherwise preventing defect mechanisms such as damage to metal silicide structures or otherwise impeding or placing limitations on subsequent process flows.