The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Dec. 13, 2005
Ajeet Rohatgi, Atlanta, GA (US);
Dong Seop Kim, Atlanta, GA (US);
Kenta Nakayashiki, Smyrna, GA (US);
Brian Rounsaville, Stockbridge, GA (US);
Ajeet Rohatgi, Atlanta, GA (US);
Dong Seop Kim, Atlanta, GA (US);
Kenta Nakayashiki, Smyrna, GA (US);
Brian Rounsaville, Stockbridge, GA (US);
Georgia Tech Research Corporation, Atlanta, GA (US);
Abstract
Disclosed are various embodiments that include a process, an arrangement, and an apparatus for boron diffusion in a wafer. In one representative embodiment, a process is provided in which a boric oxide solution is applied to a surface of the wafer. Thereafter, the wafer is subjected to a fast heat ramp-up associated with a first heating cycle that results in a release of an amount of boron for diffusion into the wafer.