The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Dec. 07, 2005
Byoung-kee Kim, Yongin-si, KR;
Se-hyung Park, Seongnam-si, KR;
Jong-min Park, Anyang-si, KR;
Seong-in Baek, Seoul, KR;
Byoung-Kee Kim, Yongin-si, KR;
Se-Hyung Park, Seongnam-si, KR;
Jong-Min Park, Anyang-si, KR;
Seong-In Baek, Seoul, KR;
Kolon Industries, Inc., Kwacheon-si, KR;
Abstract
A positive type photoresist resin film includes a support film and a thermosetting positive type photoresist resin layer laminated over the support film. The positive type photoresist resin layer contains alkali soluble resin, a diazide based photosensitive compound and a sensitivity enhancer. The support film has a surface roughness that inhibits the formation of defect structures such as fish eye. The invention overcomes process inefficiencies and defects cause by spin coating photoresist technologies.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile