The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2010

Filed:

Dec. 30, 2004
Applicants:

Hyun-woo Jun, Gyeongsangnam-Do, KR;

Chang-il Jung, Busan, KR;

Young-man Jeong, Gyeongsangnam-Do, KR;

Inventors:

Hyun-Woo Jun, Gyeongsangnam-Do, KR;

Chang-Il Jung, Busan, KR;

Young-Man Jeong, Gyeongsangnam-Do, KR;

Assignee:

LG Electronics Inc., Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

An ultra-hydrophilic Ti—O—C based nano-film of which deposition thickness was improved and deposition uniformity was excellent was fabricated by mixing a Ti precursor and a liquid having a low boiling point and a high volatility—at a uniform ratio. The catalyst accelerates a vaporization of the Ti precursor and facilitates the Ti precursor to be injected into a reaction chamber, thereby improving plasma polymerization efficiency.


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