The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
May. 25, 2006
Keisuke Yoshino, Kitakyushu, JP;
Mitsuaki Hagio, Kitakyushu, JP;
Shin Osaki, Kitakyushu, JP;
Yoshihiro Kusama, Kitakyushu, JP;
Keisuke Yoshino, Kitakyushu, JP;
Mitsuaki Hagio, Kitakyushu, JP;
Shin Osaki, Kitakyushu, JP;
Yoshihiro Kusama, Kitakyushu, JP;
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, Fukuoka, JP;
Abstract
It is an object to provide an aligner for centering a wafer and adjusting an angle of a notch or the like of the wafer while gripping edges of the wafer capable of attaining a shortened takt time and miniaturization of the apparatus by employing a mechanism capable of infinite rotation without being restricted by a rotational range, by eliminating cables and/or tubes at the rotating portion. The link mechanism for causing opening and closing movements of the gripping mechanism for gripping a waferis supported via a bearingwith respect to the link mechanism driving portion for driving the link mechanism so that only the gripping portion and the link mechanism can be rotated.