The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Apr. 21, 2008
Tsutomu Okabe, Tokyo, JP;
Jun Emoto, Tokyo, JP;
Tsutomu Okabe, Tokyo, JP;
Jun Emoto, Tokyo, JP;
TDK Corporation, Tokyo, JP;
Abstract
Adjacent to an opening portionin an FIMS system is provided an enclosure that encloses the operation space of a door and has a second opening portionopposed to the opening portion. A curtain nozzle is provided above the upper edge of the opening portionin the upper portion in the enclosure. A purge gas is supplied from the curtain nozzle along a direction from the upper edge to the lower edge of the opening portion. In addition, a gas outlet through which the purge gas flows from the interior of the enclosure out into the exterior is provided on the wall of the enclosure to which the purge gas flowing in the above described direction is directed, whereby an increase in the partial pressure of oxidizing gases in the interior of the FOUP is prevented.