The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Apr. 19, 2006
Kirk Kohnen, Fullerton, CA (US);
Peter J. Sedivec, Manhattan Beach, CA (US);
Douglas Bender, Redondo Beach, CA (US);
Gregory S. Becker, Redondo Beach, CA (US);
John Y. Liu, San Marino, CA (US);
Richard W. Guthrie, Moorpark, CA (US);
Ketao Liu, Cerritos, CA (US);
Ray Mcvey, El Segundo, CA (US);
Mark A. Lundgren, Fullerton, CA (US);
Kirk Kohnen, Fullerton, CA (US);
Peter J. Sedivec, Manhattan Beach, CA (US);
Douglas Bender, Redondo Beach, CA (US);
Gregory S. Becker, Redondo Beach, CA (US);
John Y. Liu, San Marino, CA (US);
Richard W. Guthrie, Moorpark, CA (US);
Ketao Liu, Cerritos, CA (US);
Ray McVey, El Segundo, CA (US);
Mark A. Lundgren, Fullerton, CA (US);
The Boeing Company, Chicago, IL (US);
Abstract
Systems and techniques for laser metrology. Two or more fanned probe beams are scanned relative to a surface including one or more targets. A position detection module receives return beam information from the fanned probe beams, and determines a position of at least a first target of the one or more targets based on the return beam information.