The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Apr. 30, 2008
Josef Willer, Riemerling, DE;
Michael Specht, München, DE;
Christoph Friederich, München, DE;
Doris Keitel-schulz, Höhenkirchen, DE;
Josef Willer, Riemerling, DE;
Michael Specht, München, DE;
Christoph Friederich, München, DE;
Doris Keitel-Schulz, Höhenkirchen, DE;
Qimonda AG, Munich, DE;
Abstract
A method for forming trenches on a surface of a semiconductor substrate is described. The method may include: etching a first plurality of trenches into the surface of the semiconductor substrate; filling the first plurality of trenches with at least one material; and etching a second plurality of trenches into every second trench of the first plurality of trenches. Furthermore, a method for forming floating-gate electrodes on a semiconductor substrate and an integrated circuit is described.