The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 31, 2010

Filed:

Nov. 03, 2006
Applicants:

Zhi Zheng, Beijing, CN;

Shou-shan Fan, Beijing, CN;

Inventors:

Zhi Zheng, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., Tu-Cheng, Taipei Hsien, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for manufacturing a cathode assembly of a field emission display, includes the steps of: providing a substrate () with a cathode () formed thereon; forming an electrically insulating layer (), a gate electrode layer () and a photoresist layer () on a cathode in series; defining at least one opening () in the photoresist layer using a photolithographic process; etching the gate electrode layer through the at least one opening so as to form at least one gate electrode opening () in the gate electrode layer; etching the electrically insulating layer to define at least one cavity () in the electrically insulating layer; pressing the photoresist layer in a manner such that a size of the at least one opening is reduced; depositing a catalyst layer () in the at least one cavity through the at least one opening; and growing carbon nanotubes () on the catalyst layer.


Find Patent Forward Citations

Loading…