The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Oct. 27, 2006
Applicants:
Keith Relleen, Horsham, GB;
Tristan Holtam, Horsham, GB;
Inventors:
Keith Relleen, Horsham, GB;
Tristan Holtam, Horsham, GB;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B66C 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a quadrilateral. Rotary joints are provided to join adjacent arms together, and a substrate holder is provided on one linkage arm where it joins the other linkage arm. Thus, rotating the drive arms causes the substrate holder to move. Suitable control of the drive arms allows the substrate holder to be moved through an ion beam to follow many different paths and hence implant patterns.