The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Mar. 04, 2005
Applicant:
Elfido Coss, Jr., Austin, TX (US);
Inventor:
Elfido Coss, Jr., Austin, TX (US);
Assignee:
GlobalFoundries Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.