The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Jul. 29, 2009
Applicants:
Gunnar Flach, OT Gorknitz, DE;
Thomas Quarg, Dresden, DE;
Inventors:
Gunnar Flach, OT Gorknitz, DE;
Thomas Quarg, Dresden, DE;
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be compared to reference data, for instance provided by dynamic simulation calculations, to identify high, as well as low, performing equipment on the basis of standard process control mechanisms.