The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Nov. 28, 2007
Masanu Hori, Nagoya, JP;
Seigo Takashima, Nagoya, JP;
Hiroyuki Kano, Aichi, JP;
Shoji Den, Yokohama, JP;
Masanu Hori, Nagoya, JP;
Seigo Takashima, Nagoya, JP;
Hiroyuki Kano, Aichi, JP;
Shoji Den, Yokohama, JP;
Nu ECO Engineering Co., Ltd., Nishikamo-gun, Aichi, JP;
KATAGIRI Engineering Co., Ltd., Yokohama-shi, Kanagawa, JP;
Abstract
Disclosed is a particle density measuring probe for measuring the density of atoms or molecules in a plasma atmosphere by absorption spectroscopy. The probe has a cylindrical light guiding member provided in the plasma atmosphere. At the front end of the light guiding member, there is provided a reflection plate for reflecting light that has propagated through the cylindrical light guiding member. Behind the reflection plate, in a cross section perpendicular to the longitudinal direction of the light guiding member, a part devoid of a portion of wall surface is provided by a predetermined length in the longitudinal direction. A plasma introducing portion allows mutual contact between light passing through this part devoid of a portion of wall surface and atoms or molecules in the plasma atmosphere. The probe has a main body that guides light in an axial direction by total reflection by a side wall, and that is located behind the plasma introducing portion.