The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Sep. 15, 2008
Shunsuke Isono, Toyama, JP;
Shunsuke Isono, Toyama, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A method for fabricating a semiconductor device includes the steps of: (a) forming a first insulating film having moisture absorbency on a substrate; (b) forming a dummy contact hole and a contact hole in the first insulating film; (c) heat-treating the substrate, thereby removing water contained in the first insulating film; and (d) forming a contact and a dummy contact. The heat treatment in the step (c) removes water contained in the first insulating film through the contact hole and the dummy contact hole.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile