The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 2010

Filed:

May. 03, 2007
Applicants:

Thanas Budri, Portland, ME (US);

Jiankang Bu, Windham, ME (US);

Inventors:

Thanas Budri, Portland, ME (US);

Jiankang Bu, Windham, ME (US);

Assignee:

National Semiconductor Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
Abstract

A non-volatile memory cell includes a program transistor and a control capacitor. A portion of a substrate associated with the program transistor is exposed to multiple implantations (such as DNW, HiNWell, HiPWell, and P-well implantations). Similarly, a portion of the substrate associated with the control capacitor is exposed to multiple implantations (such as DNW, HiNWell, HiPWell, P-well, and N-well implantations). These portions of the substrate may have faster oxidation rates than other portions of the substrate, allowing a thicker front-end gate oxide to be formed over these portions of the substrate. In addition, a rapid thermal process anneal can be performed, which may reduce defects in the front-end gate oxide and increase its quality without having much impact on the oxide over the other portions of the substrate.


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