The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Jul. 13, 2007
Chi-yuan Lee, Jhonghe, TW;
Shuo-jen Lee, Yonghe, TW;
Guan-wei Wu, Su-ao Township, Yilan County, TW;
Yuan Ze University, Taoyuan County, TW;
Abstract
A manufacturing method of fuel cell having micro sensors and polymer layers is disclosed. It include the following steps of: (1) depositing first polymer layer step, (2) first lithographic processing step, (3) depositing chromium layer step, (4) depositing gold layer step, (5) removing first photo-resist layer step, (6) depositing second polymer layer step, (7) second lithographic processing step, (8) plasma etching step, (9) removing second photo-resist layer step, and (10) complete step. About this invention, the polymer layers can protect the micro sensors. The micro sensors can be installed at a specific location in the flow channel. The entire manufacturing cost is lowered.