The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Aug. 28, 2002
Toshihiko Jimbo, Kanagawa-ken, JP;
Toshihide Murakami, Kanagawa-ken, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi 980-0813, JP;
Toshihiko Jimbo, Kanagawa-ken, JP;
Toshihide Murakami, Kanagawa-ken, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi 980-0813, JP;
Zeon Corporation, Tokyo, JP;
Other;
Abstract
A container for precision substrate having one or more component formed by molding a thermoplastic resin, characterized in that the component satisfies characteristics [1] and [2] below. [1] When being brought to contact ultra high purity argon gas (impurity concentration: 1 ppb or less) at 25° C. having a flow rate of 1.2 L/min., a water amount in said argon gas after 300 minutes is 30 ppb or less per a surface area 1 cmof the component. [2] When being placed in the air at 100° C., an increase amount of organics in the air in 300 minutes is 150 ng or less per weight 1 g of the component. According to the container, demands for low contamination can be satisfied.