The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Jul. 19, 2007
Applicants:
Toyoki Kunitake, Tokyo, JP;
Izumi Ichinose, Tokyo, JP;
Shigenori Fujikawa, Fujimi, JP;
Jianguo Huang, Wako, JP;
Inventors:
Toyoki Kunitake, Tokyo, JP;
Izumi Ichinose, Tokyo, JP;
Shigenori Fujikawa, Fujimi, JP;
Jianguo Huang, Wako, JP;
Assignee:
Riken, Wako-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/00 (2006.01); B05D 7/04 (2006.01); B05D 1/36 (2006.01); B05D 1/38 (2006.01); B05D 3/06 (2006.01); B31D 3/00 (2006.01); B05D 5/12 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
Amorphous metal oxide thin film is produced by removing through oxygen plasma treatment the organic component from an organics/metal oxide composite thin film having thoroughly dispersed therein such organic component at molecular scale. This ensures production of amorphous metal oxide thin film with low density and excellent thickness precision.