The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Sep. 05, 2008
Anthony G. Liepert, Lincoln, MA (US);
Anthony G. Liepert, Lincoln, MA (US);
Virian, Inc., Santa Clara, CA (US);
Abstract
A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector inlet and the test gas sensing unit, the membrane having a permeance to the test gas that varies by less than five percent over a temperature range of T−20K to T+20K, where Tis a design temperature. In addition, methods are provided for making a composite membrane that includes a semi-permeable membrane and a porous membrane. Furthermore, a reference leak, which includes a composite membrane is provided.