The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
May. 03, 2007
Applicants:
Zhenfang Chen, Cupertino, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Inventors:
Zhenfang Chen, Cupertino, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Assignee:
FUJIFILM Dimatix, Inc., Lebanon, NH (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2006.01); H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Techniques are described for forming actuators having piezoelectric material. A block of piezoelectric material is bonded to a transfer substrate. The block is then polished. The polished surface is bonded to a MEMS body.