The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Oct. 12, 2006
Swee Keng Ang, Singapore, SG;
Hanif Bin Mohamed Mohamed, Singapore, SG;
Joo Ming Jackson Tan, Singapore, SG;
Swee Keng Ang, Singapore, SG;
Hanif Bin Mohamed Mohamed, Singapore, SG;
Joo Ming Jackson Tan, Singapore, SG;
Systems on Silicon Manufacturing Co. Pte. Ltd., Singapore, SG;
Abstract
A system and method for measuring tool performance of a multi-path cluster semiconductor fabrication tool. The system comprises a status data unit for receiving up or down status data for each element of the tool for respective operational time periods; a performance value assignment unit for assigning a performance value to the tool for each time period based on the status data of the elements during said each time period; and an operational uptime unit for determining an operational uptime for a period covering the time periods of the tool based on multiplying the respective time periods with the corresponding assigned performance values.