The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Mar. 11, 2008
Applicants:
Dennis J. Bonciolini, Tigard, OR (US);
Andy K. Lim, Tigard, OR (US);
Inventors:
Dennis J. Bonciolini, Tigard, OR (US);
Andy K. Lim, Tigard, OR (US);
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wireless sensor is provided to obtain information relating to vibration of wafers or substrates in a semiconductor processing system. In one exemplary embodiment, a wireless substrate-like sensor is provided and includes a power source adapted to provide power to the sensor, a wireless communication module coupled to the power source, and a controller coupled to the power source and the wireless communication module. An acceleration detection component is operably coupled to the controller to provide information relative to acceleration of the sensor in three axes.