The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Dec. 22, 2005
Antonello DE Martino, Montrouge, FR;
Bernard Drevillon, Clamart, FR;
Antonello De Martino, Montrouge, FR;
Bernard Drevillon, Clamart, FR;
Ecole Polytechnique, Palaiseau, FR;
Centre National de la Recherche Scientifique - CNRS, Paris, FR;
Abstract
Method and a polarimetric measurement device of a planar object carrying patterns repeated regularly and forming the lines of a grid. A first measurement is carried out at zero order, under an angle of incidence θand for a first azimuthal angle φ, a second measurement at least is carried out at zero order, under an angle of incidence θand for a second azimuthal angle φ, the polarization of the incident beam is modulated and the polarization of the reflected beam is analyzed for each measurement, theoretical polarimetric data is calculated for a model object of the real object, the model object including parameters adjustable using a formalism of electromagnetism. An iterative comparison of the measurements is conducted with the theoretical polarimetric data for different values of the adjustable parameters.