The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2010

Filed:

Dec. 17, 2007
Applicants:

Wei Fan, Strongsville, OH (US);

Benjamin J. Olechnowicz, Stow, OH (US);

Marc Schaepkens, Medina, OH (US);

David M. Rusinko, Jr., Parma Heights, OH (US);

Xiang Liu, Medina, OH (US);

John T. Mariner, Avon Lake, OH (US);

Inventors:

Wei Fan, Strongsville, OH (US);

Benjamin J. Olechnowicz, Stow, OH (US);

Marc Schaepkens, Medina, OH (US);

David M. Rusinko, Jr., Parma Heights, OH (US);

Xiang Liu, Medina, OH (US);

John T. Mariner, Avon Lake, OH (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.


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