The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Sep. 14, 2005
Applicant:
Kenneth E. Gonsalves, Concord, NC (US);
Inventor:
Kenneth E. Gonsalves, Concord, NC (US);
Assignee:
The University of North Carolina at Charlotte, Charlotte, NC (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/028 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention addresses many of the current limitations in sub-100 nm lithographic techniques by providing novel resists that achieve high sensitivity, high contrast, high resolution, and high dry-etch resistance for pattern transfer to a substrate. In one embodiment, the present invention provides a polymeric resist comprising an adamantyl component and a photoacid generating component.