The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Oct. 10, 2006
Naiqian Zhang, Charlotte, NC (US);
John Cody Bailey, Mebane, NC (US);
Dan Carey, Kernesville, NC (US);
Michael T. Fresina, Greensboro, NC (US);
J. Phillip Conlon, Charlotte, NC (US);
Naiqian Zhang, Charlotte, NC (US);
John Cody Bailey, Mebane, NC (US);
Dan Carey, Kernesville, NC (US);
Michael T. Fresina, Greensboro, NC (US);
J. Phillip Conlon, Charlotte, NC (US);
RF Micro Devices, Inc., Greensboro, NC (US);
Abstract
The present invention provides a substantially hermetically sealed enclosure about an active device area of a semiconductor substrate. The enclosure is created by forming a guard ring around the active device area on the substrate, and forming a metal panel over and in contact with the guard ring to enclose the active device area. The guard ring is a laminate of metal rings formed from alternating metal filled via rings and metal trace rings. The guard ring is formed on an ohmic contact ring on the surface of the substrate. An annealing process may be used to hermetically seal the guard ring to the ohmic contact ring.