The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Oct. 19, 2006
Lars Bach, Ullersdorf, DE;
Lars Bach, Ullersdorf, DE;
Qimonda AG, Munich, DE;
Abstract
An interlayer is disposed on a pattern surface of a substrate. A buried hard mask may be provided on the interlayer. The buried hard mask includes a template opening having a template length along a line axis and a template width perpendicular thereto. The buried hard mask is filled with a fill material. A top mask is provided above the filled buried hard mask. The top mask includes a trim opening crossing the template opening and having a trim width along the line axis that is smaller than the template length. By etching the fill material and the interlayer using the top and buried hard mask a process section of the pattern surface may be exposed such that a target length and width of the process section result from the template and the trim widths. The planar dimensions of the process section may be decoupled from each other.