The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 2010

Filed:

Apr. 26, 2004
Applicants:

Robert Van Kampen, s'Hertogenbosch, NL;

Charles Gordon Smith, Cambridge, GB;

Jack Luo, Cambride, GB;

Andrew John Weeks, S'Hertogenbosch, NL;

Inventors:

Robert Van Kampen, s'Hertogenbosch, NL;

Charles Gordon Smith, Cambridge, GB;

Jack Luo, Cambride, GB;

Andrew John Weeks, S'Hertogenbosch, NL;

Assignee:

Cavendish Kinetics Ltd., Hertfordshire, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of manufacturing a micromechanical element wherein the method comprises the steps of providing a layer of base material, applying at least one at least partly sacrificial layer of an etchable material, patterning the at least partly sacrificial layer, to define at least a portion of the shape of the element, applying at least one structural layer of a mechanical material, patterning the structural layer to form at least a portion of the element, and removing at least partly the patterned at least partly sacrificial layer to release partly free the element. The mechanical material is selected from the group of conductive materials.


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