The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Apr. 04, 2007
Russell D. Allen, Mahopac, NY (US);
Stephen L. Brown, Carmel, NY (US);
Alessandro C. Callegari, Yorktown Heights, NY (US);
Michael P. Chudzik, Danbury, CT (US);
Vijay Narayanan, New York, NY (US);
Vamsi K. Paruchuri, New York, NY (US);
Russell D. Allen, Mahopac, NY (US);
Stephen L. Brown, Carmel, NY (US);
Alessandro C. Callegari, Yorktown Heights, NY (US);
Michael P. Chudzik, Danbury, CT (US);
Vijay Narayanan, New York, NY (US);
Vamsi K. Paruchuri, New York, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Measurement of the extinction coefficient k is employed for effective and prompt in-line monitoring and/or controlling of the metal film composition. The dependency of the extinction coefficient on the composition of a metal compound is characterized by measuring the extinction coefficients of a series of the metal compound with different compositions. A monitor metal film is then deposited on a wafer. The extinction coefficient k of the film on the wafer is measured and a film compositional parameter is extracted. The wafer processing may continue if k is in specification or the needed compositional change in the film may be extracted from the measured value of the k and the established dependence of k on the composition of the film for out-of-spec k values.