The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 2010

Filed:

Jun. 25, 2004
Applicants:

Yukio Miyairi, Nagoya, JP;

Yasumasa Fujioka, Nagoya, JP;

Masaaki Masuda, Nagoya, JP;

Takeshi Sakuma, Nagoya, JP;

Tatsuhiko Hatano, Kasugai, JP;

Yoshihiro Sato, Nisshin, JP;

Junichi Suzuki, Kuwana, JP;

Inventors:

Yukio Miyairi, Nagoya, JP;

Yasumasa Fujioka, Nagoya, JP;

Masaaki Masuda, Nagoya, JP;

Takeshi Sakuma, Nagoya, JP;

Tatsuhiko Hatano, Kasugai, JP;

Yoshihiro Sato, Nisshin, JP;

Junichi Suzuki, Kuwana, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 19/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A plasma generating electrode of the present invention includes a pair of unit electrodes, each of the pair of unit electrodesincluding a plate-like ceramic bodyand a conductive filmdisposed inside the ceramic bodyand including a plurality of protrusionson a front surface, the pair of unit electrodesconstituting a basic unitby being hierarchically layered at intervals corresponding to thickness of the protrusionin a state that a plurality of spaces which are open on each end in the arrangement direction of the protrusion are formed, the basic unitsconstituting an electrode unit in which the basic unitsare hierarchically layered at intervals corresponding to the thickness of the protrusion, and the plasma generating electrode being capable of generating plasma in the three-dimensionally arranged spaces V upon application of voltage between the unit electrodesconstituting the electrode unit. Therefore, the plasma generating electrode is capable of generating uniform and stable plasma and exhibiting excellent heat resistance.


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