The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 2010

Filed:

Jan. 19, 2005
Applicants:

Chul-joo Hwang, Gyeonggi-do, KR;

Sang-do Lee, Gyeonggi-do, KR;

Inventors:

Chul-Joo Hwang, Gyeonggi-do, KR;

Sang-Do Lee, Gyeonggi-do, KR;

Assignee:

Jusung Engineering Co., Ltd., Gwangju-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame.


Find Patent Forward Citations

Hwang, Chul-Joo. (2010). Substrate supporting means having wire and apparatus using the same (U.S. Patent No. 7771538). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7771538

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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