The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 2010

Filed:

Feb. 05, 2008
Applicants:

An Nguyen-dinh, Valleres, FR;

Nicolas Felix, Tours, FR;

Aimé Flesch, Andrésy, FR;

Inventors:

An Nguyen-Dinh, Valleres, FR;

Nicolas Felix, Tours, FR;

Aimé Flesch, Andrésy, FR;

Assignee:

VERMON, Tours, FR;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.


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