The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Jun. 20, 2007
Yasukazu Ono, Kasugai, JP;
Yasukazu Ono, Kasugai, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
To provide a control method and a control program of a prober that are capable of enhancing throughput. Chips are tested in step S. In step S, when the counted number Y of conforming chips has reached a predetermined number of conforming chips X which constitutes conditions for testing, the process advances to step S. In step S, testing of wafers taking place at that time is interrupted, and this wafer is stored in an output cassette OC. In a subsequent step S, the subsequent wafer is tested, and stored in the output cassette OC(step S). When all wafers have been tested, the process advances to step S, and testing of the lot is completed. As a result, wafers that remain untested and wafers that have been tested stored separately in the input cassette and the output cassettes.