The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Jul. 24, 2008
Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
Takamichi Fujii, Kanagawa-ken, JP;
Tsuyoshi Mita, Kanagawa-ken, JP;
Yoshikazu Hishinuma, Kanagawa-ken, JP;
Takamichi Fujii, Kanagawa-ken, JP;
Tsuyoshi Mita, Kanagawa-ken, JP;
Yoshikazu Hishinuma, Kanagawa-ken, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.