The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Dec. 26, 2007
Applicants:
Kun Kim, Gumi-si, KR;
Jin-kyun Hong, Gumi-si, KR;
Woo-hyun Seo, Cheongju-si, KR;
Kyoung-hwan Song, Busan, KR;
Inventors:
Kun Kim, Gumi-si, KR;
Jin-Kyun Hong, Gumi-si, KR;
Woo-Hyun Seo, Cheongju-si, KR;
Kyoung-Hwan Song, Busan, KR;
Assignee:
Siltron, Inc., Gumi, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer support pin has a front end contacted with a wafer such that the front end is flat or rounded. Thus, gravitational stress is minimized during annealing the wafer, thereby minimizing slip dislocation. This wafer support pin is suitably used for annealing of a wafer, particularly high temperature rapid thermal annealing of a large-diameter wafer.