The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Oct. 05, 2007
Applicants:
Kiyoshi Arita, Fukuoka, JP;
Hiroshi Haji, Fukuoka, JP;
Inventors:
Kiyoshi Arita, Fukuoka, JP;
Hiroshi Haji, Fukuoka, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
After a film layerformed from a die attach filmand a UV tapehas been provided as a mask on a semiconductor wafer, boundary trenchesfor partitioning semiconductor elementsformed on a circuit pattern formation surfaceare formed in the film layer, thereby making a surfaceof a semiconductor waferexposed. The exposed surfaceof the semiconductor waferin the boundary trenchesis etched by means of plasma of a fluorine-based gas, and the semiconductor waferis sliced into semiconductor chips' along the boundary trenches