The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Jan. 26, 2007
Takao Kusaka, Yokohama, JP;
Nobuki Yoshimatsu, Kawasaki, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Takao Kusaka, Yokohama, JP;
Nobuki Yoshimatsu, Kawasaki, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.