The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Jul. 18, 2007
Tadahiro Ohmi, Miyagi, JP;
Yusuke Muraoka, Kyoto, JP;
Yasuyoshi Miyaji, Kyoto, JP;
Yasushi Nagashima, Nara, JP;
Tadahiro Ohmi, Miyagi, JP;
Yusuke Muraoka, Kyoto, JP;
Yasuyoshi Miyaji, Kyoto, JP;
Yasushi Nagashima, Nara, JP;
Tohoku University, , JP;
Future Vision Inc., , JP;
Abstract
A stage body has a holding surface for placing a substrate thereon. A predetermined embossed configuration is formed by embossing on the holding surface, and thereafter an alumina film in an amorphous state is formed by an anodic oxidation process on the holding surface. The alumina film having an amorphous structure is dense and strong to provide high wear resistance and to substantially prevent separation electrification. This provides a substrate stage having high wear resistance and capable of preventing separation electrification.