The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Aug. 29, 2008
Roland Trassl, Gieβen, DE;
Jian Liu, Groβkrotzenburg, DE;
Stephan Wieder, Frankfurt, DE;
Jürgen Henrich, Limeshain, DE;
Gerhard Rist, Langenselbold, DE;
Roland Trassl, Gieβen, DE;
Jian Liu, Groβkrotzenburg, DE;
Stephan Wieder, Frankfurt, DE;
Jürgen Henrich, Limeshain, DE;
Gerhard Rist, Langenselbold, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention relates to a method for manufacturing a backside contact of a semiconductor component, in particular, of a solar cell, comprising a metallic layer on the backside of a substrate in a vacuum treatment chamber, and the use of a vacuum treatment system for performing said method. Through this method and its use, in particular silicon based solar cells, can be provided with a back contact in a simple manner in a continuous process sequence, wherein the process sequence can be provided particularly efficient and economical, since no handling systems for rotating the substrate are required, and in particular silk screening steps can be dispensed with.