The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Oct. 03, 2008
Toshifumi Takahashi, Kanagawa, JP;
Toshifumi Takahashi, Kanagawa, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
A manufacturing method of semiconductor device includes: forming a nitride film above a silicon substrate including a first region and a second region which respectively correspond to an outside of a memory cell region and the memory cell region; forming trenches reaching from the nitride film to the silicon substrate; retreating the nitride film such that widths of the trenches at the nitride film become wider; forming a buried oxide film to be buried in the trenches after the retreating; polishing the buried oxide film with the nitride film being used as a stopper; removing the nitride film after the polishing; implanting impurity after the removing; forming gate electrodes after the implanting; and implanting impurity after the forming the gate electrodes.