The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Jul. 11, 2006
Daniel A. Hall, West Newbury, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
William Fosnight, Carlisle, MA (US);
Jeff G. Araujo, Tyngsboro, MA (US);
Steven Allen, Nashua, NH (US);
Glenn Sindledecker, Dracut, MA (US);
Daniel A. Hall, West Newbury, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
William Fosnight, Carlisle, MA (US);
Jeff G. Araujo, Tyngsboro, MA (US);
Steven Allen, Nashua, NH (US);
Glenn Sindledecker, Dracut, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.