The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Dec. 07, 2006
Osamu Morimoto, Utsunomiya, JP;
Osamu Morimoto, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An apparatus for measuring at least one of an arrangement and shape of shots formed on a substrate, comprises a scope configured to obtain an image of an alignment mark corresponding to a shot; and a calculating device configured to calculate a difference between a position of the alignment mark in the image obtained by the scope and a designed position of the alignment mark, obtain a non-linear component of the calculated difference with respect to each of a plurality of conditions, calculate an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions, and select, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices.