The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Oct. 31, 2005
Kenneth J. Faase, Corvallis, OR (US);
James Mckinnell, Salam, OR (US);
Arthur R. Piehl, Corvallis, OR (US);
Murali Chaparala, Vancouver, WA (US);
James R. Przybyla, Philomath, OR (US);
Bao Yeh, Corvallis, OR (US);
Adel Jilani, Corvallis, OR (US);
Eric Nikkel, Philomath, OR (US);
Kenneth J. Faase, Corvallis, OR (US);
James McKinnell, Salam, OR (US);
Arthur R. Piehl, Corvallis, OR (US);
Murali Chaparala, Vancouver, WA (US);
James R. Przybyla, Philomath, OR (US);
Bao Yeh, Corvallis, OR (US);
Adel Jilani, Corvallis, OR (US);
Eric Nikkel, Philomath, OR (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.