The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Mar. 07, 2007
Tetsuro Fukui, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Katsumi Aoki, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Takanori Matsuda, Tokyo, JP;
Hiroshi Funakubo, Yokohama, JP;
Shintaro Yokoyama, Yokohama, JP;
Takashi Katoda, Kochi, JP;
Ken Nishida, Yokosuka, JP;
Tetsuro Fukui, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Katsumi Aoki, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Takanori Matsuda, Tokyo, JP;
Hiroshi Funakubo, Yokohama, JP;
Shintaro Yokoyama, Yokohama, JP;
Takashi Katoda, Kochi, JP;
Ken Nishida, Yokosuka, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Tokyo Institute of Technology, Tokyo, JP;
Abstract
An optical element satisfactory in transparency and characteristics as an optical modulation element, and a piezoelectric substance element satisfactory in precision and reproducibility as a fine element such as MEMS can be provided. The piezoelectric substance element includes, on a substrate, at least a first electrode, a piezoelectric substance film and a second electrode. The piezoelectric substance film does not contain a layer-structured boundary plane; the crystal phase constituting the piezoelectric substance film comprises at least two of a tetragonal, a rhombohedral, a pseudocubic, an orthorhombic and a monoclinic; and the piezoelectric substance film includes, in a portion in which a change in the composition is within a range of ±2%, a portion where a proportion of the different crystal phases changes gradually in a thickness direction of the film.