Method for fabricating semiconductor device with recess gate

Abstract

A method for fabricating a semiconductor device includes forming a sacrificial layer having a stack structure of a first insulation layer, a first conductive layer and a second insulation layer over a substrate, forming a recess by etching the sacrificial layer and the substrate, forming a gate insulation layer over a recess surface, filling a second conductive layer in the recess and between etched sacrificial layers, forming a gate electrode metal layer, a gate hard mask layer and a gate mask pattern over a resultant substrate, etching layers formed below the gate mask pattern by using the gate mask pattern until the first conductive layer is exposed, thereby forming an initial gate pattern, forming a capping layer on a sidewall and a top portion of the initial gate pattern, and etching an exposed portion by using the capping layer as a mask until the first insulation layer is exposed, thereby forming a final gate pattern.