The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
May. 29, 2008
Morito Akiyama, Saga, JP;
Toshihiro Kamohara, Saga, JP;
Naohiro Ueno, Saga, JP;
Kazuhiko Kano, Aichi, JP;
Akihiko Teshigahara, Aichi, JP;
Yukihiro Takeuchi, Aichi, JP;
Nobuaki Kawahara, Aichi, JP;
Morito Akiyama, Saga, JP;
Toshihiro Kamohara, Saga, JP;
Naohiro Ueno, Saga, JP;
Kazuhiko Kano, Aichi, JP;
Akihiko Teshigahara, Aichi, JP;
Yukihiro Takeuchi, Aichi, JP;
Nobuaki Kawahara, Aichi, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
DENSO CORPORATION, Kariya, JP;
Abstract
A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.