The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Jul. 31, 2007
David Mitlin, Edmonton, CA;
Colin Ophus, Edmonton, CA;
Stephane Evoy, Edmonton, CA;
Velimir Radmilovic, Piedmont, CA (US);
Reza Mohammadi, Edmonton, CA;
Ken Westra, Edmonton, CA;
Nathaniel Nelson-fitzpatrick, Edmonton, CA;
Zonghoon Lee, Albany, CA (US);
David Mitlin, Edmonton, CA;
Colin Ophus, Edmonton, CA;
Stephane Evoy, Edmonton, CA;
Velimir Radmilovic, Piedmont, CA (US);
Reza Mohammadi, Edmonton, CA;
Ken Westra, Edmonton, CA;
Nathaniel Nelson-Fitzpatrick, Edmonton, CA;
Zonghoon Lee, Albany, CA (US);
The Governors of the University of Alberta, Edmonton, Alberta, CA;
The University of California, Oakland, CA (US);
Abstract
A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.