The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Jun. 15, 2006
Osamu Wakabayashi, Kanagawa, JP;
Takahito Kumazaki, Kanagawa, JP;
Osamu Wakabayashi, Kanagawa, JP;
Takahito Kumazaki, Kanagawa, JP;
Komatsu Ltd, Tokyo, JP;
Ushio Inc., Tokyo, JP;
Abstract
The control of the spectral purity width E95 is performed while imparting practically no effect to the control of a central wavelength, and the spectral purity width E95 is stabilized. A wavefront adjusteris provided on an output side of the interior of an optical resonator, i.e., on an output couplerside. Light generated in a laser chamberis transmitted through the wavefront adjusterfrom the laser chamberside, and reaches the output coupler. In the wavefront adjuster, the distance between concave and convex lensesandis adjusted so that a desired spectral purity width E95 can be obtained. Then, when the light passes through the wavefront adjuster, the wavefront of the light is adjusted to a desired wavefront.