The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Sep. 06, 2005
Masaharu Komori, Kyoto, JP;
Aizoh Kubo, Kyoto, JP;
Yoshihiro Oda, Kyoto, JP;
Kyoto University, Kyoto-Shi, Kyoto-Fu, JP;
Abstract
A pitch measurement method of performing noncontact measurement of a pitch of target portions, the target portions being provided in an object and adjacent to each other, includes moving the object such that the target portions move along a same path, continuously acquiring and storing optical data of the target portions passing a predetermined position on the path from a fixed position, while focusing on the predetermined position, calculating a focusing evaluation value representing a degree of focus at an area corresponding to the predetermined position, using a movement distance of the target portions as a variable, according to a relationship between the optical data and the movement distance, and obtaining a point group of combinations of the movement distance and the focusing evaluation value, and applying a reference curve to the point group, thereby determining the pitch based on a position where the reference curve is applied.