The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Sep. 30, 2008
Takao Ohnishi, Fuso-Town, JP;
Hideki Shimizu, Ohbu, JP;
Katsuyuki Tsuneoka, Settsu, JP;
NGK Insulators, Ltd., Nagoya-shi, JP;
Abstract
A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm portion. The lower electrode is formed on the substrate in such a manner as to extend over the thin-walled diaphragm portion and the thick portion. The piezoelectric/electrostrictive film is formed on the lower electrode. The upper electrode is provided on the piezoelectric/electrostrictive film in such a manner as to face the thin-walled diaphragm portion. The upper electrode includes an upper-electrode body portion and a connection portion. The upper-electrode body portion has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion.